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dc.date.accessioned 2021-08-02T14:49:03Z
dc.date.available 2021-08-02T14:49:03Z
dc.date.issued 2011
dc.identifier.uri http://sedici.unlp.edu.ar/handle/10915/121958
dc.description.abstract This paper presents the modeling, design and characterization of planar microinductor, to be used in telemetry systems that supply energy to miniaturized implants. First, a model for the electrical characteristics of planar coils will be discussed. Parasitic electrical effects that may become important at AC-frequencies of several MHz are evaluated. The fabrication process and electrical characterization of planar microcoils will be described. Different configurations of planar microinductor were made with the use of micromachining technologies such as thin film deposition, standard photolithography processes and electroplating. With this technology small coils are relatively easy to fabricate reproducibly. The parameters and performance of fabricated inductor will be evaluated by electrical measurements. Measurements show a good agreement between calculated and measured values. en
dc.format.extent 243-246 es
dc.language es es
dc.subject Microinductor planar es
dc.subject Microválvula para glaucoma es
dc.subject MEMs es
dc.subject Microfabricación es
dc.subject Electroplateado es
dc.title Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS es
dc.type Objeto de conferencia es
sedici.identifier.isbn 978-950-34-0749-3 es
sedici.creator.person Pérez, M. C. es
sedici.creator.person Sassetti, F. L. es
sedici.creator.person Guarnieri, F. A. es
sedici.subject.materias Ingeniería es
sedici.description.fulltext true es
mods.originInfo.place Centro de Técnicas Analógico-Digitales es
sedici.subtype Objeto de conferencia es
sedici.rights.license Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)
sedici.rights.uri http://creativecommons.org/licenses/by-nc-sa/4.0/
sedici.date.exposure 2011-09
sedici.relation.event II Congreso de Microelectrónica Aplicada (μEA 2011) (La Plata, 7 al 9 de septiembre de 2011) es
sedici.description.peerReview peer-review es
sedici.relation.bookTitle Libro de Memorias: II Congreso de Microelectrónica Aplicada 2011 es

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Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0) Except where otherwise noted, this item's license is described as Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)